Read Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69)

Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69)

Michael R. Oliver

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Description:This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69). To get started finding Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69), you are right to find our website which has a comprehensive collection of manuals listed.
Our library is the biggest of these that have literally hundreds of thousands of different products represented.

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ISBN: 3662062348

Description: This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69). To get started finding Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69), you are right to find our website which has a comprehensive collection of manuals listed.
Our library is the biggest of these that have literally hundreds of thousands of different products represented.

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Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69)

Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science Book 69)

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